Micron Technology Incorporated

Intel Corporation

Luca Fumagalli

Christopher W Petz

Terrence B McDaniel

Vinay Nair

Durai Vishak Nirmal Ramaswamy

John David Hopkins

Yongjun Jeff Hu

Jordan D Greenlee

Rita J Klein

Everett Allen McTeer

Andrea Gotti

Davide Erbetta

Kentaro Ishii

Che-Chi Lee

Christian George Emor

Clement Jacob

Amirhasan Nourbakhsh

Kehao Zhang

Albert P Chan

Innocenzo Tortorelli

Si-Woo Lee

Enrico Varesi

Davide Colombo

Valter Soncini

Carla Maria Lazzari

A microelectronic device includes a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.

Microelectronic devices, memory devices, and electronic systems

Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.

Methods of forming apparatuses having tungsten-containing structures

Some embodiments include an integrated assembly having first and second source/drain regions laterally offset from one another. Metal silicide is adjacent to lateral surfaces of the source/drain regions. Metal is adjacent to the metal silicide. Container-shaped first and second capacitor electrodes are coupled to the source/drain regions through the metal silicide and the metal. Capacitor dielectric material lines interior surfaces of the container-shaped first and second capacitor electrodes, A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends into the lined first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.

Integrated assemblies and methods forming integrated assemblies

Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems

Systems, methods, and apparatuses are provided for digit line formation for horizontally oriented access devices. One example method includes forming layers of a first dielectric material, a low doped semiconductor material, and a second dielectric material, in repeating iterations vertically to form a vertical stack, forming a vertical opening in the vertical stack, selectively etching the second dielectric material to form a horizontal opening in the second dielectric material, gas phase doping a dopant on a top surface of the low doped semiconductor material in the horizontal opening to form a source/drain region, forming a high doped semiconductor material in the horizontal opening, selectively etching the high doped semiconductor material formed in the horizontal opening such that a portion of the high doped semiconductor material remains, and converting the remaining high doped semiconductor material to a conductive material having a different characteristic from the remaining high doped semiconductor material.

Digit line formation for horizontally oriented access devices

A method of forming an apparatus comprises forming a first metal nitride material over an upper surface of a conductive material within an opening extending through at least one dielectric material through a non-conformal deposition process. A second metal nitride material is formed over an upper surface of the first metal nitride material and side surfaces of the at least one dielectric material partially defining boundaries of the opening through a conformal deposition process. A conductive structure is formed over surfaces of the second metal nitride material within the opening. Apparatuses and electronic systems are also described.

Devices, methods of forming a device, and memory devices

Apparatuses comprising protective material along surfaces of tungsten-containing structures

Methods of forming an apparatus, and related apparatuses and electronic systems

Phase change memory cells, structures, and devices having a phase change material and an electrode forming an ohmic contact therewith which includes carbon and tungsten doped with nitrogen are disclosed and described. Such electrodes have a low contact resistance with the phase change material and a high thermal stability from room temperature to temperatures needed for programming operations.

Materials and components in phase change memory devices

A phase change memory cell comprising a first chalcogenide compound on a first electrode, a first nitrogenated carbon material directly on the first chalcogenide compound, a second chalcogenide compound directly on the first nitrogenated carbon material, and a second nitrogenated carbon material directly on the second chalcogenide compound and directly on a second electrode. Other phase change memory cells are described. A method of forming a phase change memory cell and a phase change memory device are also described.

Phase change memory cells including nitrogenated carbon materials, and related methods

Phase change memory cells including nitrogenated carbon materials, methods of forming the same, and phase change memory devices including nitrogenated carbon materials

Memory cells and memory cell structures having a number of phase change material gradients, devices utilizing the same, and methods of forming the same are disclosed herein. One example of forming a memory cell includes forming a first electrode material, forming a phase change material gradient on the first electrode material, and forming a second electrode material on the phase change material gradient.

Phase change material gradient structures and methods

Some embodiments include memory cells which contain chalcogenide material having germanium in combination with one or both of antimony and tellurium. An atomic percentage of the germanium within the chalcogenide material is greater than 50%; and may be, for example, within a range of from greater than or equal to about 52% to less than or equal to about 78%. In some embodiments, the memory cell has a top electrode over the chalcogenide material, a heater element under and directly against the chalcogenide material, and a bottom electrode beneath the heater element. The heater element may be L-shaped, with the L-shape having a vertical pillar region joining with a horizontal leg region. A bottom surface of the horizontal leg region may be directly against the bottom electrode, and a top surface of the vertical pillar region may be directly against the chalcogenide material.

Memory cells

Growing community of inventors

Boise, ID, United States of America

Luca Fumagalli