Fei Comapny

Lubomir Tuma

Alexander Henstra

Tomás Vystavel

Bohuslav Sed'a

Libor Novak

Jacob Simon Faber

Michal Hrouzek

Martin Cafourek

Pavel Poloucek

Josef Sesták

Tomáš Trnkócy

Timothy Burnett

The invention relates to a method of determining an aberration of a charged particle microscope. The method comprises a step of providing a charged particle microscope that is at least partly operable by a user. Then, a set of image data is obtained with said charged particle microscope. The image data is processed to determine an aberration of said charged particle microscope. According to the invention, said set of image data is actively obtained by a user. In particular, the image data may be obtained during normal operation of the microscope by a user, which may include navigating and/or focusing of the microscope. Thus, the set of image data is acquired by said user, and not by the controller thereof. This allows background processing of an aberration, and aberration correction during use of the charged particle microscope. The invention further relates to a charged particle microscope incorporating the method.

Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope

Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

Contactless temperature measurement in a charged particle microscope

A method of producing a corrected beam of charged particles for use in a charged-particle microscope, comprising the following steps:

Charged-particle microscope with astigmatism compensation and energy-selection

A specimen holder for a Charged Particle Microscope is disclosed. The holder has a support structure with an elongated member including a specimen mounting zone. The specimen mounting zone comprises a rotor with an axis perpendicular to the elongated member with a paddle connected to it which may be rotated. Specimens may be mounted on the paddle so that rotation of the paddle allows specimens to be rotated and/or inverted for microscopic observation on both sides. Specimens may either be directly mounted on the paddle, or on a grid, half-moon grid, lift-out grid, aperture frame, dielectric film, etc.

Specimen holder for a charged particle microscope

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Brno, Czechia

Lubomir Tuma