Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,777 patents)
2 patents:
1. 7542134 - System, method and apparatus for in-situ substrate inspection
2. 7397555 - System, method and apparatus for in-situ substrate inspection