Agere Systems Inc.

Agility Communications, Inc.

Lu Fang

Charles D Carr

Timothy Butrie

Joseph Edward Riska

John William Herman

Xiaoqing Yin

Dhiraj H Malkani

Rory Keene Schlenker

Zhencan Fan

Michael Hahn

The invention is a device and method of fabrication where an array of electrostatically activated members of (e.g., movable mirrors) formed in a layer comprising silicon is mounted over a ceramic substrate. The substrate includes conductors formed on a major surface and in via holes formed in the substrate. The conductors are positioned so as to selectively operate the array of mirrors.

MEMS device

The present invention provides a method of testing micro-electrical mechanical mirrors including simultaneously applying a voltage to each of a plurality of such mirrors to tilt each of the plurality to a deflection angle, and simultaneously deflecting a beam from each of the plurality using an interferometer to simultaneously determine an accuracy of the deflection angle of each of the plurality. In addition, a method of manufacturing micro-electrical mechanical mirrors is also disclosed.

Methods of testing and manufacturing micro-electrical mechanical mirrors

An optoelectronic device comprising a laser and a lens for generating collimated light, a locker including an etalon for wavelength locking the collimated light, a first thermoelectric cooler coupled to the laser, and a second thermoelectric cooler coupled to the locker, wherein the first and second thermo-electric coolers arc independently controlled and the second thermo-electric cooler provides for temperature tuning of the etalon.

Dual thermoelectric cooler optoelectronic package and manufacture process

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Orefield, PA, United States of America

Lu Fang