Atlantic Inertial Systems, Inc.

Louise Snell

Alan R Malvern

Steven Westbury

A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.

Accelerometer

An accelerometer comprises a support (), a proof mass () supported for movement relative to the support () by a plurality of mounting legs (), a plurality of fixed capacitor fingers associated with the support () and a plurality of movable capacitor fingers associated with the proof mass (), the fixed capacitor fingers being interdigitated with the movable capacitor fingers, the mounting legs () being of serpentine shape, each mounting leg () comprising at least a first generally straight section (), a second generally straight section (), and an end section () of generally U-shaped form interconnecting the first and second generally straight sections (), wherein the thickness Te of the end section () is greater than the thickness Tc of a central part () of both of the first and second generally straight sections ().

Growing community of inventors

Plymouth, United Kingdom

Louise Snell