Wisconsin Alumni Research Foundation

Louis M Holzman

Thomas F Kelly

Patrick Paul Camus

Stephen X Skaff

Christopher A Buck

Quang Van Dao

Sateeshchandra S Bajikar

David J Larson

Ronald B Howes

An atom probe provides rapidly pulsed field evaporation/desorption of ions from a tip utilizing a local extraction electrode positioned closely adjacent to the tip. A bias potential is applied between the tip and the local extraction electrode which provides an electric field at the tip which is less than but near the field intensity required for field evaporation of ions. Additional potential is applied between the tip and the extraction electrode in relatively low over-voltage pulses to obtain field evaporation of ions without substantially accelerating the ions. The ions extracted from the tip by the sharply defined pulses pass through an aperture in the extraction electrode and are accelerated by a large potential difference between the tip and a detector spaced from the tip and the local extraction electrode. An intermediate acceleration electrode may be positioned between the extraction electrode and the detector, with the acceleration electrode having an aperture therein to pass ions therethrough to the detector. The acceleration electrode is maintained at a higher potential with respect to the tip than the extraction electrode, and may be maintained at the same potential as the detector so that ions passed through the acceleration electrode coast to the detector. The use of relatively low voltage pulses to obtain evaporation of ions permits rapid repetition of the pulses, on the order of hundreds of thousands of pulses per second, to allow rapid accumulation of atom probe data.

High mass resolution local-electrode atom probe

A position sensitive detector has one or more wedge-and-wedge anode units, each of which has four electrodes on a planar surface arranged in a plurality of sets of four wedge-shaped electrode elements each, with the sets extending across the anode unit. Two of the electrode elements become progressively wider from set to set from one side of the anode unit to the other, while the other two electrode elements become progressively narrower. The respective electrode elements in each set are electrically connected together to complete the four electrodes. The charge measured on each of the four electrodes can be utilized to determine the X and Y coordinates of an event which results in a charge cloud impacting the anode, with redundant information available from the four electrodes. The coordinates calculated using charge information from any three of the electrodes can be compared with information calculated from the charge measured from the fourth electrode and two of the other electrodes, and the two sets of calculations can be compared. If each set of calculations does not yield the same result, two or more events have occurred simultaneously at different positions, and the measured data can be rejected to avoid erroneous data. The electrodes of large arrays of such anode units can be readily connected together to cover a large detector area with a minimal number of data output lines required, and with the capability of determining the position of simultaneous events by taking advantage of the redundant information available from each anode unit.

Position sensitive detector providing position information with enhanced

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Madison, WI, United States of America

Louis M Holzman