Applied Materials, Inc.

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Ald Vacuum Technologies Gmbh

Lothar Lippert

Reiner Hinterschuster

Ivaylo Popov

Stefan Dauwe

Bernd Sitzmann

Johannes Fachinger

Thomas Kilzer

Stefan Lemke

A chamber for physical vapor deposition is provided. The chamber includes a housing, a door for opening and closing the housing, and a bearing for receiving a target, wherein the bearing is oriented in a first direction. Further, the chamber is adapted so that the target is at least partially removable from the chamber in the first direction. According to an embodiment, a chamber for physical vapor deposition is provided. The chamber is adapted for receiving at least one target and a substrate. The chamber includes a housing, a door, and at least one bearing for mounting the target, wherein the bearing is attached to the door.

Chamber for physical vapour deposition and door for a physical vapour deposition chamber

Growing community of inventors

Kleinostheim, Germany

Lothar Lippert