Robert Boschgmbh

Carl-zeiss-smt Ag

Messer Griesheim Gmbh

Siemens Axiva Gmbh & Co. Kg

Lothar Gail

Eberhard Jost

Albrecht Hof

Klemens Thoma

Rainald Forbert

Guenter Maul

Thomas Hertfelder

Wilfried Schierholz

Berthold Duethorn

Ekkehard Eigenherr

A projection exposure apparatus is equipped with an illumination system, a reticle, a projection objective and an image plane. Interstitial spaces between the individual elements of the apparatus are open to the ambient space. A gas purge device which carries a stream of noble gas or nitrogen is arranged in at least one of the interstitial spaces. The gas purge device is of a shape and size so that one or more interstitial spaces are at least to a large extent sealed off from the ambient space surrounding the projection apparatus.

Device for sealing a projection exposure apparatus

The invention relates to a method and a device for separating at least two physical areas ( ) and for reducing the transmission of air-borne particles between said physical areas so as to protect persons and/or products ( ) from said air-borne particles. The persons is located at least partly in the first physical area ( ) and the products ( ) in the second physical area ( ) and at least one flat jet ( ) of purified air is used to separate the two areas. The invention is characterized in that at least one low-turbulence displacement air stream ( ) of purified air is generated at least in the second physical area ( ) near the at least one air jet ( ) and said at least one displacement air stream is directed primarily in the same direction as the at least one air jet ( ).

Method and device for protecting persons and/or products from air-borne particles

An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small bottles or ampules. The processing chamber is separated from an outside region via an intermediate region. The intermediate region having a movable door by means of which manual interventions in the processing chamber can be made. The apparatus also has a ventilation system with a blower and a clean-air filter which inside the processing chamber generates a laminar air flow. By means of special air pressure ratios in the processing chamber the intermediate region the entrance gate and the exit gate, the occurrence of contamination, or its exceeding a tolerable amount, in the processing chamber ( ) and the outside region is avoided.

Method and apparatus for air guidance in a processing chamber

Samples of materials, such as biological materials, are stored in liquid nitrogen in containers arranged as sliding sleeves wherein the outer sleeve is longer than the inner sleeve and has an apertured protruding edge so that a sealed wire can be threaded therethrough.

Sliding sleeve for storage of samples

Growing community of inventors

Wiesbaden, Germany

Lothar Gail