Leybold Vakuum Gmbh

Oerlikon Leybold Vacuum Gmbh

Leybold Vacuum Gmbh

Lothar Brenner

Hartmut Kriehn

Thomas Dreifert

Klaus Rofall

Manfred Behling

Michael Froitzheim

A vacuum pump () comprising a pump chamber casing () accommodating two co-operating rotors () which are respectively arranged on a shaft (). A bearing/gear chamber () is disposed adjacent to the pump chamber casing () in which the rotor shafts () are cantilevered and provided with a synchronisation gear (). A drive motor () whose drive shaft () extending parallel to the rotor shafts () and is provided with a drive gear (). A gear stage () is disposed between the drive shaft () and one of the rotor shafts (). In order to provide a machine of this type which can be embodied in a compact form, the drive gear () of the drive shaft () engages directly with a driven gear () on one of the rotor shafts (), forming the gear stage ().

Two shaft vacuum pump with cantilevered rotors

A vacuum pump has two shafts () and two rotors () which co-operate with each other and which are fixed to the shafts. The rotors are cantilevered on the shafts. The rotors are fixed to the shafts in a manner which is devoid of backlash, even during temperature changes. In order to achieve this, the shafts () are made of a material having a modulus of elasticity which is as high as possible, e.g., steel. The rotors () are made of a material having a density which is as low as possible, e.g., aluminum or a titanium alloy. Structures (; etc.) are provided to ensure that the rotors () are fixed to the shafts () in a manner which is devoid of backlash at all operating temperatures.

Two-shaft vacuum pump

A screw vacuum pump ( ) has shafts ( ) and rotors ( ) secured to the shafts. Each rotor has a central hollow chamber ( ) which receives the shaft or contains in built-in components rotating along with the rotor to define a relatively thin annular slot segment ( ) for cross-flow circulation of coolant. The annular slot segment is disposed between the built-in components and an inner wall of the rotor's hollow chamber and between a suction side and a delivery side of the rotor. Separate feed and discharge lines ( ) circulate the coolant through the annular slot segment in such a way that the coolant remains cavitation-free and bubble-free.

Screw vacuum pump with a coolant circuit

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Bad Münstereifel, Germany

Lothar Brenner