Leybold Aktiengesellschaft

Lothar Brenner

Hartmut Kriehn

Sascha Bauer

Hanns-Peter Berges

Rudolf Bahnen

Paul Bachmann

Monika Kuhn

Uwe Gottschlich

Andreas Kobus

A method of operating a claw-type vacuum pump with two or more stages, each of which has a suction chamber with a pair of claw rotors and end-located suction and discharge ports. To avoid the possibility of liquids affecting operation of the pump, the invention proposes that the pump is operated without internal compression and that the gases emerging from at least one stage are cooled.

Method of operating a claw-type vacuum pump and a claw-type vacuum pump

Muffler

Dry-running twin-shaft vacuum pump

Device for supplying a multi-stage dry-running vacuum pump with inert gas

The invention relates to a method for the operation of a multi-stage, dry compression vacuum pump (1) with an inlet (7) and an outlet (9), in which the aspirated gases contain gaseous components which endanger the operation of the vacuum pump; in order to render the gas components harmless it is proposed that the gases aspirated from the vacuum chamber (8) and flowing through the vacuum pump be carried through a reaction chamber (14) in which the components endangering the vacuum pump are chemically or physically treated at a pressure between the aspiration pressure and the outlet pressure of the vacuum pump.

Multi-stage vacuum pump with reaction chamber between stages

Growing community of inventors

Munstereifel, Germany

Lothar Brenner