Avago Technologies International Sales Pte. Limited

Lori Ann Callaghan

David Martin

Lovell Harold Camnitz

Sean T Hansen

Kun Wang

Alexia Kekoa

Bernhard Ulrich Koelle

Keri Liane Williams

In a bulk acoustic resonator device, at least one additional metal feature is formed on a top surface of the bottom electrode at a location at which the bottom electrode electrical contact will subsequently be formed, thereby thickening the metal at the location below where the piezoelectric material layer will be etched to form the opening for the bottom electrode electrical contact. Consequently, even though some of the metal of the additional metal feature and/or of the bottom electrode will be removed during the process of etching the opening in the piezoelectric material layer, the bottom electrode will always retain sufficient thickness after the piezoelectric material layer is etched.

Bulk acoustic resonator devices and processes for fabricating bulk acoustic resonator devices

Growing community of inventors

Menlo Park, CA, United States of America

Lori Ann Callaghan