Stmicroelectronics S.r.l.

Lorenzo Gola

Andrea Paleari

Federica Ronchi

Sonia Pirotta

An electric contact structure includes a first structural layer; a second structural layer made of dielectric material extending over the first structural layer; and an intermediate layer made of conductive material extending between the first structural layer and the second structural layer. A trench extends in the second structural layer delimited laterally by a wall of the second structural layer and at the bottom by a surface region of the intermediate layer. A diffusion barrier extends in the trench covering the surface region of the intermediate layer and the wall of the second structural layer. The diffusion barrier is a TiW&#x2014;TiN&#x2014;TiW tri-layer.

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Cusago, Italy

Lorenzo Gola