Carl Zeiss Smt Gmbh

Lorenz Lechner

Thomas Anthony Case

Susan Candell

Wayne Broderick

Naomi Kotwal

Allen Gu

A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

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San Ramon, CA, United States of America

Lorenz Lechner