Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Lorenz Grünerbel

Martin Richter

Sebastian Kibler

Christian Wald

Yuecel Congar

Henry Leistner

Agnes Bußmann

Agnes Bussmann

According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.) a defined positive fluid pressure in the sensor chamber or (3.) a defined fluid flow, e.g. fluid throughput, through the sensor chamber.

Sensor arrangement and method for sensing an amount or a concentration of a target fluid in a medium with the sensor arrangement

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Munich, Germany

Lorenz Grünerbel