University of Utah Research Foundation

Loren Rieth

Florian Solzbacher

Michael Orthner

A testing and analysis system for a pressure-sensitive device () that includes a testing stage () comprising a platform having a groove situated on an upper surface, an endless support gasket located in the endless groove, a pressure port located on the upper surface and interior to the endless groove, and a means for securing a substrate above the upper surface. The substrate () supports a pressure-sensitive device () to form a pressure chamber between the substrate () and the upper surface. A pressure source () is operatively connected to the pressure port to modify a pressure inside the pressure chamber and deflect the pressure-sensitive device (). A surface profile measurement apparatus () is included for measuring a surface profile of the deflected pressure-sensitive device ().

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Salt Lake City, UT, United States of America

Loren Rieth