International Business Machines Corporation

Lonn E Moore

Rodney A Kendall

Maris A Sturans

David J Pinckney

Richard Rieland

Rajinder S Dhaliwal

Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material.

Carbon tube for electron beam application

A clamping flexure for use in a vacuum employs a spring-loaded shaft that pulls an object being supported against a support piece, including a mechanism, passing through the vacuum vessel, for releasing the spring tension during adjustment, the shaft being sufficiently compliant that restoring force after adjustment is less than a threshold value so that displacement of the shaft does not impress a force on the object being supported that returns it toward its position before adjustment.

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Millbrook, NY, United States of America

Lonn E Moore