Precis LLC

Quartzdyne, Inc.

Lon Perry

Scott Brown

K Robert Harker

Diana R Clark

A pressure sensor that resonates in the thickness-shear mode (TSM) includes a center resonator structure, a first electrode positioned on a first side of the center resonator structure, and a first electrode flag. The first electrode flag forms a first electrically conductive path from the first electrode toward an outer portion of the center resonator structure. The first electrode flag extends at least partially over the first side of the center resonator structure. The first electrode flag also includes one or more first tab metals migrated thereinto from opposing sides of the first electrode flag.

Thickness-shear mode resonators

A quartz pressure sensor that resonates in the thickness-shear mode can include a center resonator structure and first and second caps joined to the center resonator structure by bond joints. Each bond joint is comprised of a sealing glass having thickness less than 0.0012 inches (&#x2dc;30 &#x3bc;m) and a melting point less than 573&#xb0; C. The quartz pressure sensor can additionally include an inner diameter edge feature formed between the interior sidewall in the joint sidewall of the caps that reduces stresses at the bond joints and/or a high stress point in the cap bore.

Isolation elements comprise a housing comprising a longitudinal bore formed therein and at least one recess formed in at least one longitudinally extending side of the housing. The at least one recess is in communication with the longitudinal bore. At least one diaphragm is attached proximate a periphery thereof to the housing and seals the at least one recess at the at least one longitudinally extending side of the housing. Sensor assemblies may include an isolation element including a housing and a diaphragm coupled thereto. Methods of forming an isolation element for use with a sensor comprise forming a longitudinal bore in a housing; forming at least one recess in at least one longitudinally extending side of the housing; coupling at least one diaphragm to the housing; and positioning the at least one diaphragm such that a primary direction of displacement of the at least one diaphragm extends into the at least one recess.

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South Jordan, UT, United States of America

Lon Perry