Qc Optics, Inc.

Lloyd P Quackenbos

Sergey V Broude

Eric T Chase

Jay L Ormsby

Nicholas C Allen

Pascal Miller

Abdu Boudour

Bruno Rostaing

An improved high sensitivity optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: a first and a second illumination means for illuminating predetermined regions on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

A surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scanning a pit or a mound on the surface.

Surface pit and mound detection and discrimination system and method

Growing community of inventors

Newburyport, MA, United States of America

Lloyd P Quackenbos