Japan Electronic Materials Corporation

Liwen Fan

Teppei Kimura

It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide platefor a probe card includes a metal basefirst insulation layersand metal layersThe metal basehas a plurality of through holesto receive probes therethrough, and inner walls of the through holesThe first insulation layersare of tuboid shape and provided on the respective inner walls of the through holesof the metal baseThe metal layersare provided on the first insulation layers

Guide plate for a probe card and probe card provided with same

It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide platefor a probe card includes a metal base; first insulation layers; and metal layers. The metal basehas a plurality of through holesto receive probes therethrough, and inner walls of the through holes. The first insulation layersare of tuboid shape and provided on the respective inner walls of the through holesof the metal base. The metal layersare provided on the first insulation layers

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Amagasaki, Japan

Liwen Fan