Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Shanghai Sensetime Intelligent Technology Co., Ltd

Liwei Wu

Hai Xia

Hong Iris Zhu

Lin Zhang

Kai Yang

Jie Fang

Jim Yang

Qingsheng Chen

Jingjing Fei

Jinchun Li

Yeqin Zheng

Subing Duan

Jessy Xu

Junqing Dong

Samuel Leng

Celia Xin

Lanzhou Yan

Zihao Xu

The present disclosure relates to an image processing method and device, an electronic apparatus and a storage medium. The method comprises: acquiring an iris image group comprising at least two iris images to be compared; detecting iris locations in the iris images and segmentation results of iris areas in the iris images; performing multi-scale feature extraction and multi-scale feature fusion on an image area corresponding to the iris locations, to obtain iris feature maps corresponding to the iris images; performing comparison using the segmentation results and the iris feature maps respectively corresponding to the at least two iris images, and determining whether the at least two iris images correspond to the same object based on a comparison result of the comparison. Embodiments of the present disclosure realize accurate comparison of iris images.

Image processing method and device and storage medium

A six-degree-of-freedom linear motor is disclosed, including a magnet array and a coil group disposed above the magnet array, the magnet array includes a first Halbach magnet array and a second Halbach magnet array, the first Halbach magnet array has a parallelogrammic cross section in a plane defined by X- and Y-axes, the first Halbach magnet array has a first side parallel to the Y-axis and a second side forming an angle of &#x3b8; with the Y-axis, the second Halbach magnet array is in mirror symmetry with the first Halbach magnet array with respect to the Y-axis, and the coil group includes a first, second, third and fourth coil group, each having an axis inclined at an angle of &#x3b8; with respect to the Y-axis, the first and second coil groups are in mirror symmetry with the third and fourth coil groups with respect to the Y-axis, respectively.

Six-degree-of-freedom linear motor

A Halbach magnetic array is disclosed, including a plurality of first and second magnetic units alternately arranged in a width direction, wherein: each first magnetic unit includes first magnetic groups and first magnetic columns alternately arranged in a length direction, each first magnetic group includes four first magnetic bars arranged in a 2*2 matrix; each second magnetic unit includes second magnetic groups and second magnetic columns alternately arranged in the length direction, each second magnetic group includes four second magnetic bars arranged in a 2*2 matrix; each first magnetic column is magnetized in a height direction, and each second magnetic column is magnetized in a direction opposite to the height direction. A magnetic suspension vibration damper is also disclosed.

Halbach array and magnetic suspension damper using same

A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of &#x394;P in the Y-axis direction. &#x394;P satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.

Linear motor and stage apparatus

A method for measuring and calibrating a centroid of a coarse stage of a photolithography tool by means of measuring an offset of the centroid relative to a midpoint of the coarse stage is disclosed. The method includes: individually performing closed-loop controls on parameters of the three degrees of freedom X, Y, and Rz of the coarse stage and converting the parameters into coordinates in a coordinate system of the coarse stage (); for each of the X and Y directions, estimating a range for the centroid (), equally dividing the range into N parts (), and designating each dividing point as an eccentricity (); obtaining N Rz direction positional deviations by conducting a compensation calibration and a calibration calculation based on each corresponding eccentricity (-); comparing a minimum of the N positional deviations with a preset Rz-direction positional deviation threshold (), completing the measurement if the latter is greater (), and otherwise designating a range between the eccentricities adjacently in front of and behind the eccentricity corresponding to the minimum positional deviation as a new range for the centroid (-) and repeating the measurement until the minimum is smaller than the preset threshold.

Method for measuring and calibrating centroid of coarse stage of photolithography tool

A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform () is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (), air floating elements () disposed on a bottom of the aerostatic bearing plate () and a vacuum pre-tightening structure () disposed on the aerostatic bearing plate (). The vacuum pre-tightening structure () is coupled to the aerostatic bearing plate () in a split fashion. Separation of the air floating elements () from the vacuum pre-tightening structure () prevents the aerostatic bearing plate () from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.

Split type aerostatic bearing

A complementary metal oxide semiconductor (CMOS) image sensor device includes a capacitive coupled photodiode that is formed within a region of a semiconductor substrate. The photodiode receives an incident light and generates a corresponding electric charge. The CMOS image sensor device includes a reset transistor coupled to the photodiode for reverse biasing the photodiode with a predetermined voltage. The CMOS image sensor device further includes a buffer circuit and a capacitor, which is interposed between the photodiode and the buffer circuit. The capacitor is configured to transfer the electric charge to the buffer circuit. The buffer circuit may include an emitter follower or a source follower transistor.

CMOS image sensor with non-contact structure

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Shanghai, China

Liwei Wu