Chinese Academy of Sciences

Lisong Dong

Wei Jiang

Jing Jin

Jie Cui

Guiyan Zhao

Libin Zhang

Rui Chen

Yayi Wei

Yajuan Su

Jianfang He

Le Ma

The present disclosure provides a method for optimizing mask parameters, and the method includes: acquiring a test pattern, light source parameters, and initial mask parameters, the initial mask parameters including a mask thickness and an initial mask sidewall angle; generating multiple sets of candidate mask parameters according to the initial mask sidewall angle in the initial mask parameters; the multiple sets of candidate mask parameters including different mask sidewall angles and the same mask thickness; obtaining an imaging contrast of each set of candidate mask parameters based on the test pattern and the light source parameters; and selecting an optimal mask sidewall angle from the multiple sets of candidate mask parameters according to the imaging contrasts. By generating multiple sets of candidate mask parameters including different mask sidewall angles and the same mask thickness, and simulating these sets of candidate mask parameters respectively, the imaging contrast of each set of candidate mask parameters is obtained, so that the optimal mask sidewall angle is found according to the imaging contrasts. Therefore, by optimizing the mask parameters of the multi-layer film lens structure, the imaging contrast can also be significantly improved, and the imaging resolution can be improved.

Method and device for optimizing mask parameters

This invention provides a chlorinated poly(propylene carbonate) and the preparation method thereof, the chlorinated poly(propylene carbonate) is as represented by formula (I). Compared to the prior poly(propylene carbonate)s, the chlorinated poly(propylene carbonate) has relatively stronger electronegativity due to the presence of chlorine atoms and the interaction of the chlorinated poly(propylene carbonate) with other polar materials can be enhanced, so that it can be widely used as a compatilizer, a binder, a paint, an ink, and the like. After the introduction of chlorine atoms, hydrogen bond interaction is generated within the chlorinated poly(propylene carbonate), so that its processability and mechanical properties are both improved. Furthermore, the chlorine atom may improve the flame retardancy of chlorinated poly(propylene carbonate) materials. 

Chlorinated poly(propylene carbonate) and preparation method thereof

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Jilin, China

Lisong Dong