Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Us, Inc. (1 from 22 patents)
2. Silicon Valley Group Thermal System LLC (1 from 1 patent)
2 patents:
1. 6485783 - Chemical vapor deposition system
2. 6206973 - Chemical vapor deposition system and method