Asml Netherlands B.v.

Western Digital (fremont), Inc.

Liping Ren

Maurits Van Der Schaar

Youping Zhang

Hakki Ergün Cekli

Marc Jurian Kea

Chi-Hsiang Fan

Masashi Ishibashi

Ralph Timotheus Huijgen

Marcel Theodorus Maria Van Kessel

Lei Wang

Yingjian Chen

Ming Zhao

Christopher T Ngo

A method, system and program for determining a position of a feature referenced to a substrate. The method includes measuring a position of the feature, receiving an intended placement of the feature and determining an estimate of a placement error based on knowledge of a relative position of a first reference feature referenced to a first layer on a substrate with respect to a second reference feature referenced to a second layer on a substrate. The updated position may be used to position the layer of the substrate having the feature, or another layer of the substrate, or another layer of another substrate.

Method of determining a position of a feature

A method for providing a magnetic recording transducer is disclosed. The method includes providing a first pole having front and rear portions and a back gap on the rear portion. The method also includes providing an insulator on the first pole. The method includes providing a write gap and providing a portion of a second pole on at least the write gap. A portion of the write gap resides on the front portion of the first pole. A portion of the insulator covers a portion of the first pole between the portion of the second pole and the back gap. The method also includes providing a mask that covers the back gap and exposes the portion of the second pole and the insulator. The method also includes performing a pole trim that can substantially remove the portion of the insulator covering the remaining portion of the first pole.

Method of manufacturing a magnetic recording transducer

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San Jose, CA, United States of America

Liping Ren