Qualcomm Mems Technologies, Inc.

Rafael Advanced Defense Systems Ltd.

Idc, LLC

Lior Kogut

Ming-Hau Tung

Teruo Sasagawa

Clarence Chui

Yeh-Jiun Tung

William J Cummings

Brian James Gally

Denis H Endisch

Fan Zhong

Chih-Wei Chiang

Manish Kothari

Jeffrey Brian Sampsell

Marc Mignard

Chun-Ming Wang

Brian W Arbuckle

Stephen Zee

Aviv Ronen

Segev Ben Itzhak

Ion Bita

Alan G Lewis

Qi Luo

Sriram Akella

Chengbin Qiu

Oren Lahav

Haim Shalev

Chengbin Qui

Ming Hau Tung

A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Electromechanical device with optical function separated from mechanical and electrical function

Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Method of manufacturing MEMS devices providing air gap control

A micro-opto-electromechanical rotation rate sensor (MOERRS) device, in which a rotation rate sensor is associated with peripheral circuitry. The magnitude of the output signal of the MOERRS is adaptable to correspond to a range of mechanical stimuli to which the sensor is sensitive, in order to accommodate the signal magnitude to the dynamic range available in the MOERRS device. The signal emanating from the rotation rate sensor is facilitated to exploit the dynamic range of said MOERRS device, by modifying some properties of one or more items on the MOERRS.

Adaptive modifications in micro opto-electro-mechanical systems

A micro-opto-electro-mechanical system having a proof mass; at least one illumination source for providing illumination; an illumination detector; peripheral electronics; and an illumination mitigating mechanism for mitigating the effect of illumination emitted from the at least one illumination source on the peripheral electronics. According to various embodiments, the illumination mitigating mechanism includes handles disposed on the proof mass, an illumination collimating device, a substrate with a recess, a narrow beam light source, an illumination absorbing layer or optical limiters.

Optomechanical MEMS device including a proof mass and an illumination mitigating mechanism

Embodiments of MEMS devices include support structures having substantially vertical sidewalls. Certain support structures are formed through deposition of self-planarizing materials or via a plating process. Other support structures are formed via a spacer etch. Other MEMS devices include support structures at least partially underlying a movable layer, where the portions of the support structures underlying the movable layer include a convex sidewall. In further embodiments, a portion of the support structure extends through an aperture in the movable layer and over at least a portion of the movable layer.

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.

MEMS devices with multi-component sacrificial layers

Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another.

Electromechanical device configured to minimize stress-related deformation and methods for fabricating same

An optical device for modulating the intensity of light from an interferometric reflector. In one embodiment, the optical device can include an optical stack having a reflective layer and a partially reflective, partially transmissive layer for reflecting light. The optical device can also include a fluid cell comprising an absorptive fluid and a transmissive fluid. The optical device can also include a mechanism for controlling the portion of the reflector which is shadowed by the absorptive fluid.

Modulating the intensity of light from an interferometric reflector

A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

Analog interferometric modulator device with electrostatic actuation and release

Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.

Integrated imods and solar cells on a substrate

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Sunnyvale, CA, United States of America

Lior Kogut