Fei Comapny

Lingbo Yu

Bart Jozef Janssen

Erik Michiel Franken

Maarten Kuijper

Erik Franken

A method of using a Transmission Charged Particle Microscope, comprising:

Innovative imaging technique in transmission charged particle microscopy

When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.

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Eindhoven, Netherlands

Lingbo Yu