Airmems

Centre National De La Recherche Scientifique

Université De Limoges

Ling Yan Zhang

Romain Stefanini

Pierre Blondy

Abedel Halim Zahr

Kevin Nadaud

Fabien Roubeau

Kévin Nadaud

A radio frequency micro-electromechanical switch (RF MEMS switch) is described. Also described is a method of producing such an RF MEMS switch. The method can include depositing on a substrate a first sacrificial layer and producing a pattern. A first layer of metal is deposited on the first sacrificial layer and on the substrate. A pattern is produced to form a first RF line and a first MEMS membrane. A second sacrificial layer is deposited on the first RF line and a pattern is produced. A dielectric layer is deposited on the second sacrificial layer and then a pattern is produced to form a dome. The first and second sacrificial layers are removed through a dome opening. A second metal layer is deposited on the dome and on the substrate, and then a pattern is produced to plug the dome opening(s) and to form a second RF line.

Method for manufacturing variable radio frequency micro-electromechanical switch

A micro-electromechanical-system (MEMS) switch () is formed in a substrate () and includes a first RF signal line () and a second RF signal line (), a deformable membrane (), an activator () configured to deform the membrane (), a substrate track, and a membrane track. The RF signal lines () are connected by one of the membrane track and the substrate track. A membrane RF ground () is integrated into the membrane (), and the membrane RF ground is electrically connected to a substrate RF ground (), the membrane RF ground framing and being formed parallel to at least one among the membrane track () and the substrate track, such that the RF ground () closely follows the RF signal path, in order to guide the propagation of the RF signal of the first RF signal line () to the second RF signal line () when the switch is in the on state.

MEMS membrane with integrated transmission line

A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.

Robust microelectromechanical switch

Growing community of inventors

Cognac-la-Foret, France

Ling Yan Zhang