Electro Scientific Industries, Inc.

Ling Wen

Mehmet Emin Alpay

Jeffrey Howerton

Jeff Howerton

A method for laser machining through micro-holes having desired geometric cross-section requirements in a thin, substantially homogenous material.

Method for machining tapered micro holes

To better address these problems, one or more characteristics are measured from a work piece (). The measurement information is used to select a preferred predetermined laser processing recipe from a lookup table. The laser processing recipe is then used to process the work piece (). The lookup table of laser processing recipes can be established from theoretical calculations, from trial an error by an operator, from an automated systematic recipe variation process with post process testing, or from some combination of these or other methods. An automated process can also reduce operator errors and may store measurement values for convenient tracking of work piece characteristics.

Automatic recipe management for laser processing a work piece

An apparatus and method performing a sequence of processing steps on a load supported by a processing plate. The load can include a single sheet on which a plurality of applications are performed or can include a plurality of panels on which respective applications are performed. For each application, at least one coarse target and at least one panel target are used to adjust the programmed coordinates for that application. After the first application of the load is processed using the coarse and panel targets, coarse and panel targets are located for the second application. Using the alignment provided by these targets, the second application is processed. Each subsequent application is similarly aligned and processed.

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Portland, OR, United States of America

Ling Wen