Yangtze Memory Technologies Co., Ltd.

Swinburne University of Technology

Ling Fu

Fei Wang

Min Gu

Tao Huang

Yadong Wang

Zheng Yi Cai

Xing Jin

Jing Yun Wu

Xiaosong Gan

Ge Ge Zhao

An assessment system includes a storage device and a processing circuit. The processing circuit is coupled to the storage device and configured to execute the instructions stored in the storage device. The storage device is configured for storing instructions of extracting at least one feature parameter corresponding to at least one defect detected on an object respectively; determining at least one feature evaluation according to the at least one feature parameter respectively; weighting the at least one feature evaluation to calculate at least one weighted feature evaluation respectively; summing the at least one weighted feature evaluation to calculate at least one total score corresponding to at least one lesson-learnt case; and ranking the at least one total score corresponding to the at least one lesson-learnt case to find out a suspected root cause corresponding to one of the at least one lesson-learnt case with higher priority.

Automatic assessment method and assessment system thereof for yield improvement

An imaging system including a multi-mode fiber and a gradient index (GRIN) lens. The invention also relates to a system including a multi-mode fiber, such as a double-clad photonic crystal fiber, for transmitting an excitation signal to a sample for the purpose of imaging, and a scanning mechanism, which preferably includes a microelectromechanical system (MEMS) mirror, for reflecting the excitation signal in varying directions in order to scan the sample.

Imaging system

Growing community of inventors

Wuhan, China

Ling Fu