Electro Scientific Industries, Inc.

Lindsey M Dotson

Mark Alan Unrath

William J Jordens

David A Watt

Laura H Campbell

Jeffrey W Leonard

Robert W Colby

Michael Tyler

Cris E Hill

A method and system increase processed specimen yield in the laser processing of target material that includes multiple specimens formed on a common substrate. Preferred embodiments implement a feature that enables storage in the laser processing system a list of defective specimens that have somehow been subject to error during laser processing. Once the common substrate has been completely processed, the system alerts an operator to the number of improperly processed specimens and gives the operator an opportunity to run a software routine, which in a preferred embodiment uses a laser to scribe a mark on the top surface of each improperly processed specimen.

Tracking and marking specimens having defects formed during laser via drilling

A method and system increase the quality of results achieved by laser micromachining systems. Data relating to parameters controlling laser micromachining process are recorded during the micromachining process, identified by the feature associated with the parameters used to micromachine, and stored on the system. The stored data can be either retrieved during the micromachining process to enable real time control or retrieved after workpiece processing to conduct statistical process control.

Energy monitoring or control of individual vias formed during laser micromachining

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Portland, OR, United States of America

Lindsey M Dotson