Tosoh Smd, Inc.

Lin Zhu

Charles E Wickersham, Jr

Alexander Leybovich

John E Poole

David B Smathers

Eugene Y Ivanov

Methods for reducing inclusion content of sputter targets and targets so produced are disclosed. Inclusions may be reduced by adding a small amount of Si to the molten Al or molten Al alloy followed by filtering of the molten metals through a filter medium. Targets having substantially no inclusions therein of greater than about 400 &#x3bc;m are especially useful in the sputtering of large flat panel displays and result, upon sputtering, in a reduction in the amount of macroparticles sputtered onto the substrate.

Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering

The present invention relates to a method for determining a critical size for a diameter of an AlOinclusion () in an Al or Al alloy sputter target () to prevent arcing during sputtering thereof. This method includes providing a sputtering apparatus having an argon plasma. The plasma has a plasma sheath of a known thickness during sputtering under a selected sputtering environment of an Al or Al alloy sputter target having an AlOinclusion-free sputtering surface. When the thickness of the sheath is known for a selected sputtering environment, the critical size of an AlOinclusion () can be determined based upon the thickness of the sheath. More specifically, the diameter of an AlOinclusion () in an Al or Al alloy sputter target () must be less than the thickness of the plasma sheath during sputtering under the selected sputtering environment to inhibit arcing.

Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target

A method of constructing increased life sputter targets and targets made by the method are disclosed. The method comprises starting with a precursor target design or profile and making magnetic field strength measurements along the radial surface of same and at a plurality of vertical dimensions above the surface. An optimal magnetic field strength ratio is provided between the erosion tracks of the target. The vertical dimension of the material to be added to one of the erosion tracks is determined and then the height of the other erosion track is calculated by utilizing this optimal magnetic field strength ratio.

Growing community of inventors

Grove City, OH, United States of America

Lin Zhu