Taiwan Semiconductor Manufacturing Comp. Ltd.

Silicon Touch Technology Inc.

Lin Ping Zhang

Danping Peng

Chi-Yuan Chin

Junjiang Lei

Yong Cao

Zhiru Yu

Yan Feng

Zhi Gao Xu

A system and a method of optimizing an optical proximity correction (OPC) model for a mask pattern of a photo mask is disclosed. A machine learning (ML) based model builder includes an OPC model, measurement data and a random term generator. Random terms are generated in a M-dimensional space by the random term generator. The ML based model builder classifies the random terms to clusters by applying a classifying rule. A representative subset of the random terms is determined among the classified clusters, and the representative subset is added to the OPC model.

Machine learning based model builder and its applications for pattern transferring in semiconductor manufacturing

In a method of manufacturing a lithographic mask of an integrated circuit for semiconductor device manufacturing an optical proximity correction (OPC) process to a layout pattern of the integrated circuit is performed to produce a corrected layout pattern. An inverse lithographic technology (ILT) process to the corrected layout pattern is also performed to enhance the corrected layout pattern to produce an OPC-ILT-enhanced layout pattern of the lithographic mask. A first contour image associated with the OPC-ILT-enhanced layout pattern is generated when the OPC-ILT-enhanced layout pattern of the lithographic mask is projected on a wafer. The features of the generated first contour image are extracted. And a second contour image of a developed photo resist pattern on the wafer associated with the OPC-ILT-enhanced layout pattern as an output of a deep neural network is generated.

Methods of preparing photo mask data and manufacturing a photo mask

A crystal lens includes a liquid crystal layer, a pair of alignment layers, a first electrode set, and a second electrode set. The alignment layers are positioned on different sides of the liquid crystal layer. The first and second electrode sets are positioned on different alignment layers. The first electrode set includes a first transparent insulating layer and a first electrode layer. The first electrode set attaches to one of the alignment layers. The second electrode set includes a second transparent insulating layer, a second electrode layer, and a dielectric film. The second electrode layer includes a hole-patterned electrode. The dielectric film attaches to the first transparent insulating layer. The hole-patterned electrode exposes the dielectric film. In addition, an external power supply provides a driving voltage to the hole-patterned electrode and the first electrode layer, so that the liquid crystal molecules inside the liquid crystal layer drive rotation.

Liquid crystal lens

A liquid crystal lens structure is disclosed, comprising a first substrate and a second substrate each having oppositely arranged sides, a first side and second side. A liquid crystal layer is disposed between the first substrate and the second substrate, in which first side of the first substrate and second side of the second substrate are proximate to the liquid crystal layer. A first transparent conductive layer is disposed between the first substrate and the liquid crystal layer. A second transparent conductive layer is disposed on the second side of the second substrate, in which the second transparent conductive layer comprises a circular opening and a circular electrode in the circular opening. Thus, the invention can provide better response time and improve efficiency of the liquid crystal lens structure.

Liquid crystal lens structure and driving method thereof

An optical zoom structure includes an amplifying set, a focusing set, and an image display region. The amplifying set resembles the diverging optical effect and includes a first fixed focal set and a first liquid crystal lens. The focusing set resembles a converging optical effect and includes a second fixed focal set and a second liquid crystal lens. The first liquid crystal lens and the second fixed focal set are disposed between the first fixed focal set and the second liquid crystal lens. The first distance is from the first fixed focal set to the first liquid crystal lens. The second distance is from the first liquid crystal lens to the second fixed focal set. The third distance is from the second fixed focal set to the second liquid crystal lens. The fourth distance is from the second first liquid crystal lens to the image display region.

Growing community of inventors

Hsinchu, Taiwan

Lin Ping Zhang