Asm Technology Singapore Pte Ltd

Liming Fan

Keng Yew Song

Yam Mo Wong

Hon Yu Peter Ng

Xianbin Zhu

Apparatus for detecting the oscillation amplitude of an oscillating object ( ) includes an optical radiation source ( ) and a detector ( ) including first and second optical radiation sensing areas ( A, B) adjacent each other. The detector ( ) and the optical radiation source ( ) are adapted to be located opposite each other with the oscillating object ( ) located between the source ( ) and the detector ( ) so that the object ( ) blocks a portion of the sensing areas ( A, B) from receiving optical radiation from the source ( ). A processor ( ) coupled to the detector ( ) receives first and second output signals representing the magnitude of optical radiation sensed by the first and second optical radiation sensing areas ( A, B), respectively. The processor ( ) processes the first and second output signals to obtain an indication of the amplitude of oscillation of the object ( ).

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Liming Fan