Entegris, Inc.

Lim Joo Chai

Michael C Zabka

A process container includes flanges defining a plurality of slots. At least one of the flanges includes a tightener configured to contact a disc or wafer when the disc or wafer is inserted into one of the plurality of slots defined by said at least one of the plurality of flanges. The tightener projects outwards from said at least one of the plurality of flanges into said one of the plurality of slots. The tightener includes a tapered portion where a cross-sectional thickness of the at least one tightener increases along an insertion direction of the disc or wafer into said one of the plurality of slots. The tightener can include one continuous slope or curve. The tightener can include a chamfer. The tightener has a reduced contact area and a smooth transition as it extends from the flange, reducing rubbing and the corresponding particle shedding when discs or wafers are inserted into, removed from, or moving while stored within the process container.

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Kulim, Malaysia

Lim Joo Chai