National Formosa University

Lili Duan

Wen-Yuh Jywe

Chien-Hung Liu

Chia-Hung Wu

Jau-Jiu Ju

Chin-Tien Yang

Chun-Chieh Huang

Jing-Chung Shen

Yuan-Chin Lee

A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.

Manufacturing-process equipment

Growing community of inventors

Huwei Chen, Taiwan

Lili Duan