Chinese Academy of Sciences

Shanghai Keyan Phosphor Technology Co., Ltd.

Lihua Huang

Huijie Huang

Lei Zhou

Ming Chen

Yan Zheng

Aijun Zeng

Fang Zhang

Jingyu Bian

Shufan Geng

Baoxi Yang

Zhonghua Hu

Qiang Song

Yanfen Xiao

Ruifu Yang

Youbao Zhang

A lithography pupil shaping optical system and method for generating off-axis illumination mode. The invention is composed of illumination mode generation unit, rotatable wave plate, polarization beam splitter unit, ring I generation unit and ring II generation unit. Through selecting corresponding diffractive optical element and appropriate adjustment, this invention can generate various illumination modes including single ring illumination mode and double ring illumination mode. The intensity at pupil plane and the inner and outer diameters of the off-axis illumination mode can be adjusted continuously.

Lithography pupil shaping optical system and method for generating off-axis illumination mode

A method of indirect emission by nano-materials includes providing an infrared up-conversion phosphor 1 (weight ratio) and a long-wave ultraviolet phosphor 0.01-10 (weight ratio); treating both surfaces of the infrared up-conversion phosphor and the long-wave ultraviolet phosphor; mixing the infrared up-conversion phosphor and the long-wave ultraviolet phosphor; exciting the infrared up-conversion phosphor by a near-infrared laser with a wavelength of 980 mn to emit blue light as a secondary excitation lightsource; exciting the long-wave ultraviolet phosphor by the blue light to emit a visible light. Biological reactions can be conveniently detected by detecting the visible light.

Method of indirect emission by nano-materials

Growing community of inventors

Shanghai, China

Lihua Huang