Stmicroelectronics S.r.l.

Lidia Moioli

Pasqualina Fragneto

Beatrice Rossi

Diego Carrera

Giacomo Boracchi

Mauro Fumagalli

Elena Tagliabue

Paolo Giugni

Annalisa Aurigemma

A device includes image generation circuitry and a convolutional neural network. The image generation circuitry, in operation, generates a binned representation of a wafer defect map (WDM). The convolutional-neural-network, in operation, generates and outputs an indication of a root cause of a defect associated with the WDM based on the binned representation of the WDM and a data-driven model associating WDMs with classes of a defined set of classes of wafer defects.

Wafer manufacturing system, device and method

Growing community of inventors

Albino, Italy

Lidia Moioli