Chinese Academy of Sciences

Lianqing Liu

Peng Yu

Jialin Shi

Wei Guo

Hao Liu

Guohao Jiang

Zhongtao Zhang

Yuanyuan Zhou

A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.

Method and device for simultaneous independent motion measurement of multiple probes in atomic force microscope

An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.

Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope

A deformable segment with combined motion includes a flexible center backbone, the tendons of deformable segment with combined motion, a connecting piece, a proximal disk and a distal disk. The proximal end of the flexible center backbone and the proximal ends of the tendons of deformable segment with combined motion are fixedly connected to the proximal disk. The distal ends of the tendons of deformable segment with combined motion are fixedly connected to the distal disk. The distal end of the flexible center backbone penetrates through the distal disk and then extends into the distal execution segment, and is connected with the end-effector. The deformable segment with combined motion is provided with the connecting piece. The proximal driving segment is provided with proximal driving tendons. The proximal driving tendons penetrate through the proximal disk, and then are fixedly connected with the connecting piece.

Deformable mechanism with combined motion

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Liaoning, China

Lianqing Liu