Applied Materials, Inc.

Other

Liang-Yuh Chen

Stan D Tsai

Alain Duboust

Feng Quan Liu

Yan Wang

Rashid Mavliev

Antoine P Manens

Yongqi Hu

Siew Neo

Paul D Butterfield

Ted Tie Guo

Daniel A Carl

Roderick Craig Mosely

Lizhong Sun

Ralph M Wadensweiler

Ratson Morad

Shou-Sung Chang

Donald J K Olgado

Wei-Yung Hsu

Manoocher Birang

Yuchun Wang

Lu Yang

Suchitra Subrahmanyan

Mehul B Naik

Shijian Li

Fusen E Chen

Israel Beinglass

Rong Tao

Yuan Tian

Tetsuya Ishikawa

Robin W Cheung

Sasson Roger Somekh

Sen-Hou Ko

Renhe Jia

Yonqi Hu

Yezdi N Dordi

Ashok K Sinha

Quanyuan Shang

Karl M Brown

Robert Z Bachrach

Donald J Olgado

Daxin Mao

Paul F Smith

Hooman Bolandi

Peter W Hey

Vladimir Galburt

Shih-Hung Li

Victor Pebenito

Roderick Craig Mosley

Srinivas Gandikota

Jun Zhao

Hong Zhang

Seshadri Ramaswami

Wei Shi

Wen-Chiang Tu

Jallepally Ravi

You Wang

Gary C Ettinger

Zhihong Wang

Ho Seon Shin

Ming-Kuei Tseng

Martin S Wohlert

Kevin H Song

Ravi Jallepally

Huyen Karen Tran

Suresh M Shrauti

Robert A Ewald

Tianbao Du

Jing-Pei Chou

Erik C Wasinger

Hanzhong Zhang

A processing system and method of producing a particulate material are provided. The processing system includes a system inlet connected to one or more gas lines to deliver one or more gases into the processing system, a buffer chamber, a dispersion chamber, a heating assembly, a reaction chamber and a system outlet for delivering particulate material out of the processing system. The method includes delivering one or more gases via a system inlet into a buffer chamber of a processing system, jetting a liquid mixture into one or more streams of droplets using one or more power jet modules into the processing system, delivering flows of one or more heated gases via a heating assembly, forming a reaction mixture and processing the reaction mixture at a reaction temperature into a product material inside the reaction chamber.

System and process with assisted gas flow inside a reaction chamber

A system and method thereof are provided for multi-stage processing of one or more precursor compounds into a battery material. The system includes a mist generator, a drying chamber, one or more gas-solid separators, and one or more in-line reaction modules comprised of one or more gas-solid feeders, one or more gas-solid separators, and one or more reactors. Various gas-solid mixtures are formed within the internal plenums of the drying chamber, the gas-solid feeders, and the reactors. In addition, heated air or gas is served as the energy source within the processing system and as the gas source for forming the gas-solid mixtures to facilitate reaction rate and uniformity of the reactions therein. Precursor compounds are continuously delivered into the processing system and processed in-line through the internal plenums of the drying chamber and the reaction modules into final reaction particles useful as a battery material.

Multi-stage process for producing a material of a battery cell

A continuous process for producing a material of a battery cell using a system having a mist generator, a drying chamber, one or more gas-solid separators and a reactor is provided. A mist generated from a liquid mixture of two or more metal precursor compounds in desired ratio is dried inside the drying chamber. Heated air or gas is served as the gas source for forming various gas-solid mixtures and as the energy source for reactions inside the drying chamber and the reactor. One or more gas-solid separators are used in the system to separate gas-solid mixtures from the drying chamber into solid particles mixed with the metal precursor compounds and continuously deliver the solid particles into the reactor for further reaction to obtain final solid material particles with desired crystal structure, particle size, and morphology.

Method of preparing a material of a battery cell

A processing system and method of producing a particulate material from a liquid mixture are provided. The processing system generally includes a system inlet connected to one or more gas lines to deliver one or more gases into the processing system, one or more power jet modules adapted to jet a liquid mixture into one or more streams of droplets and to force the one or more streams of droplets into the processing system, and a reaction chamber adapted to deliver the one or more streams of droplets in the presence of the one or more gases and process the one or more streams of droplets into the particulate material. The method includes delivering one or more gases into a processing system, jetting the liquid mixture into one or more first droplets streams using one or more power jet modules of the processing system and into the processing system, and reacting the one or more first droplets streams delivered from the processing chamber inside a reaction chamber of the processing system in the presence of the one or more gases into the particulate material at a first temperature.

Processing system and method for producing a particulate material

A processing system for producing a product material from a liquid mixture includes an array of one or more power jet modules adapted to jet the liquid mixture into one or more streams of droplets and force the one or more streams of droplets into the processing system, a dispersion chamber and a reaction chamber adapted to process the one or more streams of droplets into the product material. A method for producing a product material from a liquid mixture on a processing system includes moving each of the one or more power jet modules and be connected to an opening of a dispersion chamber opening one or more doors of the one or more power jet modules, processing the one or more streams of droplets inside a reaction chamber, closing the one or more doors of the power jets modules and moving each of the one or more power jet modules in a second direction.

System with power jet modules and method thereof

Method for preparing a material of a battery cell

A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

In-situ deposition of battery active lithium materials by plasma spraying

A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

In-situ deposition of battery active lithium materials by thermal spraying

A substrate holder comprises a generally circular planar body, the body having greater than or equal to two pairs of diametrically opposed, parallel flat edges, and wherein the substrate holder is configured to fit on a generally circular susceptor within a processing chamber. In some embodiments the substrate holder has four pairs of diametrically opposed, parallel flat edges, whereby the substrate holder is substantially octagonal. Furthermore, in some embodiments the substrate holder covers less than eighty percent of the susceptor area. A method of processing a substrate using the substrate holder includes: loading the substrate into a recess in the substrate holder; transferring the substrate holder through a loadlock into the processing chamber, the substrate holder being presented with a smallest cross-section aligned for passage through the loadlock; placing the substrate holder on the susceptor; and processing the substrate. The substrate holder may carry a plurality of substrates. Alternatively, the substrate holder may carry a single large substrate, the substrate being trimmed to fit the substrate holder.

Non-circular substrate holders

A method and apparatus for extending a polishing article lifetime on a polishing tool with multiple platens is described. The apparatus includes an advanceable roll to roll platen with multiple embodiments of a polishing article to be used thereon. The polishing article is adapted to perform a polishing process by removing conductive and dielectric material from a substrate while minimizing downtime of the polishing tool. In some embodiments, the polishing article may be a dielectric material or a conductive material and is configured to include a longer usable lifetime to minimize replacement and downtime of the tool.

Extended pad life for ECMP and barrier removal

Apparatus and methods adapted to polish an edge of a substrate include a polishing film, a frame adapted to tension and load the polishing film so that at least a portion of the film is supported in a plane, and a substrate rotation driver adapted to rotate a substrate against the plane of the polishing film such that the polishing film is adapted to apply force to the substrate, contour to an edge of the substrate, the edge including at least an outer edge and a first bevel, and polish the outer edge and the first bevel as the substrate is rotated. Numerous other aspects are provided.

Methods and apparatus for processing a substrate

A method and apparatus for local polishing and deposition control in a process cell is generally provided. In one embodiment, an apparatus for electrochemically processing a substrate is provided that selectively polishes discrete conductive portions of a substrate by controlling an electrical bias profile across a processing area, thereby controlling processing rates between two or more conductive portions of the substrate.

Method and apparatus for local polishing control

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Foster City, CA, United States of America

Liang-Yuh Chen