Institute of Microelectronics

Lian Jun Liu

Pang Dow Foo

Mnoon Yan Loke

An apparatus for sensing an applied force comprising a deflectable bridge, formed in a substrate and spanning a recessed area. The deflectable bridge also has a sensing element. The force is applied to the bridge and in response thereto, an output characteristic of the sensing element changes in proportion to the magnitude of the applied force. The apparatus can further comprise a sensing bump in contact with the bridge, wherein the force is applied to the bridge through the sensing bump.

Growing community of inventors

Singapore, Singapore

Lian Jun Liu