General Electric Company

Li Zhao

Russell William Craddock

Roger Jones

Muhammad Irshad

A resonator deviceis disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonatorprovided on a diaphragm. A capis provided which may be fusion bonded to the diaphragmto enclose the resonatorand form a hermetically sealed package. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fiber. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonatorand the inside surface of the capto derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.

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Leicestershire, United Kingdom

Li Zhao