Taiwan Semiconductor Manufacturing Comp. Ltd.

Li-Yang Tu

Jui-Chun Weng

Hsi-Cheng Hsu

Chia-Chun Hung

Wei-Ding Wu

Ji-Hong Chiang

Han-Zong Pan

Ching-Hsiang Hu

You-Cheng Jhang

Lavanya Sanagavarapu

Jia-Syuan Li

Chun-Peng Li

Jiun-Jie Chiou

Shin-Hua Chen

Hsin-Yu Chen

Yen Chiang Liu

Hsin-yu Chen

Yen-Chiang Liu

Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1×10per cubic centimeter (cm) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.

Multifunctional collimator for contact image sensors

Disclosed is a method to fabricate a multifunctional collimator structure In one embodiment, an optical collimator, includes: a dielectric layer; a substrate; and a plurality of via holes, wherein the dielectric layer is formed over the substrate, wherein the plurality of via holes are configured as an array along a lateral direction of a first surface of the dielectric layer, wherein each of the plurality of via holes extends through the dielectric layer and the substrate from the first surface of the dielectric layer to a second surface of the substrate in a vertical direction, wherein the substrate has a bulk impurity doping concentration equal to or greater than 1&#xd7;10per cubic centimeter (cm) and a first thickness, and wherein the bulk impurity doping concentration and the first thickness of the substrate are configured so as to allow the optical collimator to filter light in a range of wavelengths.

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Hsinchu, Taiwan

Li-Yang Tu