Seiko Epson Corporation

Li Xin-Shan

Masami Murai

Maki Ito

Koji Sumi

Hiromu Miyazawa

Takamitsu Higuchi

Setsuya Iwashita

Tsutomu Nishiwaki

Hironobu Kazama

Toshinao Shinbo

Toshiaki Yokouchi

A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same

Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.

Method of manufacturing a piezoelectric element and a liquid ink jet head

A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

Method of manufacturing an actuator device

An intermediate film () is formed on a substrate (), a bottom electrode () is formed on top of this intermediate film, a ferroelectric film () or piezoelectric film () is formed on top of this bottom electrode by an ion beam assist method, and a top electrode () is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.

Piezoelectric device, liquid jetting head, ferroelectric device, electronic device and methods for manufacturing these devices

A piezoelectric liquid-jet head apparatus, which provides a nearly uniform piezoelectric element and enables ejection of liquid at maximum output, is disclosed. The piezoelectric liquid-jet head has a piezoelectric elementprovided on one surface of a passage forming substratevia a vibration plate. The piezoelectric liquid jet head includes: a zirconium oxide layerformed on the surface of the passage forming substratea cerium oxide layerformed on the zirconium oxide layera superconductor layerformed on the cerium oxide layerand composed of a yttrium-barium-copper-oxygen-based material (YBCO); a lower electrodeformed on the superconductor layerand composed of strontium ruthenate; and a piezoelectric layerwhich is a single crystal epitaxially grown on the lower electrode

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Nagano-ken, Japan

Li Xin-Shan