Taiwan Semiconductor Manufacturing Comp. Ltd.

Etron Technology, Inc.

Invention and Collaboration Laboratory Pte. Ltd.

Texas Instruments-acer Incorporated

Li-Ping Huang

Wei-Yuan Lu

Ka-Hing Fung

Chun-Fai Cheng

Han-Ting Tsai

Chao-Chun Lu

Li-Ting Wang

Ming-Shuan Li

Kuan-Chung Chen

Hsueh-Jen Yang

Wei-Ching Wang

Tze-Liang Lee

Carlos H Diaz

Chien-Hao Chen

Ying-Keung Leung

Chun-Feng Nieh

Da-Wen Lin

Shyh-Wei Wang

Chao-chun Lu

Keh-Chiang Ku

Chih-Chiang Wang

Hsun Chang

Ying-Shiou Lin

Shye-Lin Wu

Shih-Chang Chen

Chung-Cheng Wu

Yu-Chang Lin

Nai-Han Cheng

Chih-Hsiang Huang

Haiting Wang

Ka Hing Fung

Keh-Chiang Kuo

Juang-Ying Chueh

A transistor structure includes a gate, a spacer, a channel region, a first concave, and a first conductive region. The gate is above a silicon surface. The spacer is above the silicon surface and at least covers a sidewall of the gate. The channel region is under the silicon surface. The first conductive region is at least partially formed in the first concave, wherein a conductive region of a neighborhood transistor structure next to the transistor structure is at least partially formed in the first concave.

Transistor structure with reduced leakage current and adjustable on/off current

A SRAM cell structure includes a plurality of transistors, a set of contacts, a word-line, a bit-line, a VDD contacting line and a VSS contacting line. The plurality of transistors include n transistors, wherein n is a positive integral less than 6. The set of contacts are coupled to the plurality of transistors. The word-line is electrically coupled to the plurality of transistors. The bit-line and a bit line bar are electrically coupled to the plurality of transistors. The VDD contacting line is electrically coupled to the plurality of transistors. The VSS contacting line is electrically coupled to the plurality of transistors. Wherein as a minimum feature size of the SRAM cell structure gradually decreases from 28 nm, an area size of the SRAM cell in terms of square of the minimum feature size (λ) is the same or substantially the same.

SRAM cell structure

A transistor structure includes a substrate, a gate conductive region, a gate dielectric layer and a first conductive region. At least a portion of the gate conductive region is disposed below a surface of the substrate. The gate dielectric layer surrounds a bottom wall and sidewalls of the gate conductive region. A bottom wall of the first conductive region is aligned or substantially aligned with a top wall of the gate conductive region.

Transistor with controllable source/drain structure

A semiconductor device structure includes a silicon substrate, a transistor, and an interconnection. The silicon substrate has a silicon surface. The transistor includes a gate structure, a first conductive region, a second conductive region, and a channel under the silicon surface. The interconnection is extended beyond the transistor and coupled to the first conductive region of the transistor. The interconnection is disposed under the silicon surface and isolated from the silicon substrate by an isolation region.

Method forming a semiconductor device structure having an underground interconnection embedded into a silicon substrate

Semiconductor device structure with an underground interconnection embedded into a silicon substrate

A field effect transistor includes a substrate and spacers over the substrate. The field effect transistor includes a channel recess cavity between the spacers, wherein a bottom-most surface of the channel recess cavity is parallel to the substrate top surface. The field effect transistor includes a gate stack, wherein the gate stack includes a bottom portion in the channel recess cavity and a top portion outside the channel recess cavity, the gate stack further includes a gate dielectric layer extending from the channel recess cavity along sidewalls of each of the pair of spacers, and the gate dielectric layer directly contacts the substrate below substrate top surface. The field effect transistor includes a strained source/drain (S/D) below the substrate top surface, wherein the strained S/D extends below the gate stack. The field effect transistor further includes a source/drain (S/D) extension substantially conformably surrounding the strained S/D.

Strained structure of a semiconductor device

A p-type field effect transistor includes a pair of spacers over a substrate top surface. The p-type field effect transistor includes a channel recess cavity in the substrate top surface between the pair of spacers. The p-type field effect transistor includes a gate stack with a bottom portion in the channel recess cavity. The p-type field effect transistor includes a source/drain (S/D) recess cavity including a bottom surface and sidewalls below the substrate top surface, wherein the S/D recess cavity includes a portion extending below the gate stack. The p-type field effect transistor includes a strained material filling the S/D recess cavity. The p-type field effect transistor further includes a source/drain (S/D) extension substantially conformably surrounding the bottom surface and sidewalls of the S/D recess cavity. The S/D extension includes a portion between the gate stack and the S/D recess cavity.

A manufacturing method of dynamic random access memory (DRAM) with low leakage current includes forming a plurality of gates within a substrate of the DRAM; forming a plurality of drain/sources within the substrate of the DRAM by a first ion implantation; and forming a plurality of lightly doped drains under all of the plurality of drain/sources or partial drain/sources of the plurality of drain/sources by a second ion implantation after the plurality of drain/sources are formed. The plurality of lightly doped drains is used for reducing a leakage current within the DRAM, and the second ion implantation has a predetermined incident angle.

Dynamic random access memory with low leakage current and related manufacturing method thereof

A memory circuit with thyristor includes a plurality of memory cells. Each memory cell of the plurality of memory cells includes an access transistor and a thyristor. The thyristor is coupled to the access transistor. At least one of a gate of the access transistor and a gate of the thyristor has a fin structure.

Memory circuit with thyristor

In a p-type field effect transistor, a pair of spacers are formed over the top surface of a substrate. A channel recess cavity includes an indentation in the substrate top surface between the pair of spacers. A gate stack has a bottom portion in the channel recess cavity and a top portion extending outside the channel recess cavity. A source/drain (S/D) recess cavity has a bottom surface and sidewalls below the substrate top surface. The S/D recess cavity has a portion extending below the gate stack. A strained material is filled the S/D recess cavity.

Strained structure of a p-type field effect transistor

A semiconductor device includes a gate structure over a substrate, a source region in the substrate, where the source region is adjacent to the gate structure. Additionally, the semiconductor device includes a drain region in the substrate, where the drain region is adjacent to the gate structure. Moreover, the semiconductor device includes a first dislocation in the substrate between the source region and the drain region. Furthermore, the semiconductor device includes a second dislocation in the substrate between the source region and the drain region, where the second dislocation is substantially parallel to the first dislocation.

Semiconductor device

A method of forming a semiconductor device includes performing a first pre-amorphous implantation process on a substrate, where the substrate has a gate stack. The method further includes forming a first stress film over the substrate. The method also includes performing a first annealing process on the substrate and the first stress film. The method further includes performing a second pre-amorphous implantation process on the annealed substrate, forming a second stress film over the substrate, and performing a second annealing process on the substrate and the second stress film.

Semiconductor device and method of forming the same

A method includes forming a metal-oxide-semiconductor field-effect transistor (MOSFET), which includes forming a first dislocation plane adjacent to a gate electrode of the MOSFET, and forming a second dislocation plane adjacent to the gate electrode of the MOSFET. The first and the second dislocation planes are on a same side of the gate electrode, and extend into source/drain regions of the MOSFET.

MOSFETs with multiple dislocation planes

A method of fabricating and a semiconductor device with multiple dislocation structures is disclosed. The exemplary semiconductor device includes gate structure overlying a top surface of a semiconductor substrate and a first gate spacer disposed on a sidewall of the gate structure and overlying the top surface of the substrate. The semiconductor device further includes a crystallized semiconductor material overlying the top surface of the semiconductor substrate and adjacent to a sidewall of the first gate spacer. The semiconductor device further includes a second gate spacer disposed on the sidewall of the first gate spacer and overlying the crystallized semiconductor material. The semiconductor device further includes a first stressor region disposed in the semiconductor substrate and a second stressor region disposed in the semiconductor substrate and in the crystallized semiconductor material.

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Taipei, Taiwan

Li-Ping Huang