Xi 'an Chishine Optoelectronics Technology Co., Ltd.

Li Ma

Tao Yang

Huanhuan Li

Fang Xiao Wang

Xiang Zhou

NiNi Zhang

Quan Li

QingFeng Liu

Lei Peng

JunWei Jiang

Tao Liu

Yuqin Li

Di Guo

Junqi Huang

Dong Yao

Rui Jin

Fang Wang

Disclosed are an electrostatically driven comb structure of an MEMS (Micro Electro Mechanical System), a micro-mirror using the same, and a preparation method therefor. The surface of a comb of the electrostatically driven comb structure of the MEMS has an insulating layer, and the insulating layers on the surfaces of adjacent combs are the same type of insulating layers or different insulating layers; the micro-mirror with the electrostatically driven comb structure of the MEMS successively includes a substrate, an isolating layer and a device layer from bottom to top; the method for manufacturing the micro-mirror prepares the insulating layers by high temperature oxidization, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition, atmospheric pressure chemical vapor deposition, physical deposition, atomic layer deposition or stepwise heterogeneous deposition; same or different insulating layers are obtained on the surfaces of the driving comb and the ground comb; when the driving comb and the ground comb adsorb each other, the insulating layers on the surfaces of the two contact without forming a short circuit, so that a good insulating effect is achieved. The electrostatically driven MEMS micro-mirror capable of preventing adsorptive damage provided by the present invention features compact structure and simple process.

Electrostatically driven comb structure of MEMS, micro-mirror using same and preparation method therefor

Disclosed are an automatic welding system and method for large structural parts based on hybrid robots and 3D vision. The system comprises a hybrid robot system composed of a mobile robot and an MDOF robot, a 3D vision system, and a welding system used for welding. The rough positioning technique based on a mobile platform and the accurate recognition and positioning technique based on high-accuracy 3D vision are combined, so the working range of the MDOF robot in the XYZ directions is expanded, and flexible welding of large structural parts is realized. The invention adopts 3D vision, thus having better error tolerance and lower requirements for the machining accuracy of workpieces, positioning accuracy of mobile robots and placement accuracy of the workpieces; and the cost is reduced, the flexibility is improved, the working range is expanded, labor is saved, production efficiency is improved, and welding quality is improved.

Automatic welding system and method for large structural parts based on hybrid robots and 3D vision

Provided is a generation method for a programmable analog fringe pattern with an extended depth of field. A laser emits a laser beam. After focusing and collimation thereof with a collimating lens, a collimated Gaussian laser beam meeting requirements is obtained. The laser beam is reflected by a mirror once, passes through a round diaphragm and is incident on a MEMS scanning mirror. The beam is reflected by the MEMS scanning mirror to the surface of a tested object. The laser is controlled by a sinusoidal current signal generated by a drive board so as to sinusoidally modulate the brightness of the laser beam. The MEMS scanning mirror is stimulated by a drive signal generated by the drive board to turn two-dimensionally, so as to drive the laser beam to perform scanning, thus generating a fringe pattern image.

Generation method for programmable analog fringe pattern with extended depth of field

A hybrid light measurement method for measuring a three-dimensional profile comprises: Step 1 using a MEMS laser projector to realize projection of a laser stripe and a fringe pattern: and Step 2 performing matching to obtain a parallax, and incorporating a binocular stereo vision to perform reconstruction. The present disclosure employs MEMS projection technology to realize a hybrid measurement system capable of performing laser stripe measurement and fringe pattern measurement, thereby realizing quick measurement of three-dimensional profiles of objects having different surface properties. The present disclosure enables laser stripe measurement and fringe pattern measurement to be performed by the same measurement system without needing any additional hardware equipment. The projection device used in the present disclosure enables projection of multiple laser stripes, thereby increasing measurement precision and speed.

Hybrid light measurement method for measuring three-dimensional profile

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Xi'an, China

Li Ma