Industrial Technology Research Institute

Li-Jiaun Lin

Ming-Wei Lai

Shen-Chuan Lo

Shi-Ri Lee

Mei-Lun Wu

A carrier assembly and an operation method thereof are provided. The carrier assembly comprises a base, a first gear element, a second gear element, an object-carrier and a fixing part. The first gear element is rotatably disposed on the base, and the second gear element is rotatably disposed on the base and meshed with the first gear element. The object-carrier is used for carrying an object. The fixing part connects the base to a carrier platform. Wherein, an included angle is contained between the rotating axis of the first gear element and the rotating axis of the second gear element.

Carrier assembly of microscope element and operation method thereof

A method of processing objects by a FIB (Focused Ion Beam) system and a carrier used therewith are provided. The carrier includes a carrying member and a processing portion having an object disposed thereon. Before the carrier is disposed into the FIB system, the carrying member is set to be flush in height with the processing portion having the object disposed thereon. After an eucentric height adjustment inside the FIB system, both the carrying member and the processing portion are in a same plane with the eucentric point of the system. Therefore, after the object on the processing portion is processed, a processed object or a processed block of the object can be moved to the carrying member without performing further eucentric height adjustment with respect to the carrying member.

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Hsinchu, Taiwan

Li-Jiaun Lin