Western Digital (Fremont), Inc.

Li He

Yining Hu

Ge Yi

Ming Zhao

Jun Liu

Zhigang Bai

Mohamad Towfik Krounbi

Liubo Hong

Ut Tran

Jinqiu Zhang

Yizhong Wang

Yong Shen

Hai Sun

Dujiang Wan

Danning Yang

Yunfei Li

Ronghui Zhou

Kevin K Lin

Jikou Zhou

Jerome S Marcelino

Fujian Wang

A method provides a magnetic write apparatus on a substrate. A mask is provided on a substrate. The mask has a trench therein. The trench has a top, a bottom and a plurality of sidewalls extending between the top and the bottom of the trench. The top of the trench is wider than the bottom. A protective layer is provided in the trench. The protective layer extends from the top of the trench along a first portion of the plurality of sidewalls such that the bottom of the trench and a second portion of the plurality of sidewalls are free of the protective layer. The structure is provided in a remaining portion of the trench.

Method for fabricating a magnetic recording device having a high aspect ratio structure

A method fabricates a heat assisted magnetic recording (HAMR) transducer having an air-bearing surface (ABS) and that is optically coupled with a laser. The method includes providing a waveguide for directing light from the laser toward the ABS and providing a write pole having a pole tip with an ABS location facing the surface. The pole tip is in a down track direction from the waveguide. The method also includes providing at least one shield including a shield pedestal. The shield pedestal is in the down track direction from the pole tip. At least one protective pad is provided adjacent to the write pole and between the ABS location and the shield pedestal.

Method for providing a heat assisted magnetic recording transducer having protective pads

A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.

Method for providing a perpendicular magnetic recording head

A method for manufacturing a magnetic transducer is described. The method includes providing a negative mask having a bottom, a plurality of sides, and a top wider than the bottom. The method also includes depositing a nonmagnetic layer on the negative mask. The nonmagnetic layer has a plurality of portions covering the plurality of sides of the negative mask. The method also includes providing a first mask having a first trench therein. The negative mask resides in the first trench. The method further includes depositing side shield material(s), at least a portion of which resides in the first trench. The method further includes removing the negative mask to create a second trench between the plurality of portions of the nonmagnetic layer and form a pole, at least a portion of which resides in the second trench.

Method for manufacturing a magnetic recording transducer having side shields

A method and system for manufacturing a perpendicular magnetic recording transducer by a process that includes plating is described. The method and system include forming a chemical mechanical planarization (CMP) uniformity structure around a perpendicular magnetic recording pole. The CMP uniformity structure has a height substantially equal to a desired pole height. The method and system also include fabricating an insulator on the CMP uniformity structure and performing a CMP to remove a portion of the insulator. The CMP exposes a portion of the perpendicular magnetic recording pole and planarizes an exposed surface of the perpendicular magnetic recording transducer.

Method for manufacturing a perpendicular magnetic recording transducer

A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.

Write element with reduced yoke length for ultra-high density writing

Method of fabricating a write element with a reduced yoke length

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Fremont, CA, United States of America

Li He