United Microelectronics Corp.

Li-Chung Lee

Patrick Cheng

Wei-Sheng Chia

Shih-Hsun Chiu

Chung-Hsien Kao

Mei-Ling Chen

Ying-Ming Cheng

Chia-Wen Cheng

The present invention provides a flow-control apparatus with a check function for controlling the flow resistance of a photoresist solution. The apparatus is connected to a photoresist supply device, the photoresist supply device comprising a tank for storing the photoresist solution, a pipe partially submerged in the photoresist solution in the tank to transport the photoresist solution, and a pump for drawing the photoresist solution from the tank. The apparatus comprises a housing and a sphere. The housing comprises a chamber, a top opening positioned at the top of the chamber, and a bottom opening positioned at the bottom of the chamber, wherein the top opening can be mated to an end of the pipe or to a bottom opening of another apparatus. The sphere is moveably set inside the chamber of the housing and increases the flow resistance of the photoresist solution. The number of apparatuses mounted in series with the end of the pipe can be changed to control the flow resistance of the photoresist solution through the pipe when drawing the photoresist solution from the tank.

Apparatus with a check function for controlling a flow resistance of a photoresist solution

A grindstone having a vacuum system is applied to a pin chuck stepper. The vacuum system has a vacuum tube attached on the edge of the grindstone. When the grindstone moves on a pin chuck stage on the pin chuck stepper, the vacuum tube vacuums the pin chuck stage to free particles on the pin chuck stage.

Grindstone having a vacuum system in a pin chuck stepper

A container of coolant used in a NIKON.TM. stepper is utilizing a screw cap to air-tightly close a coolant inlet of the container of coolant. The container of coolant is a closed system except the coolant inlet, a circulative input duct and a circulative output duct.

Container of coolant

A container of coolant used in a NIKON.TM. stepper is utilizing a transparent duct mounted on a side of the container of coolant to check a liquid level. The container of coolant can be conventional or other similar container of coolant.

Growing community of inventors

I-Lan Hsien, Taiwan

Li-Chung Lee