Asml Netherlands B.v.

Li Chung-Hsun

Everhardus Cornelis Mos

Peter Ten Berge

Franciscus Bernardus Maria Van Bilsen

Hoite Pieter Theodoor Tolsma

Christianus Gerardus Maria De Mol

Reiner Maria Jungblut

Leonardus Henricus Marie Verstappen

Paul Jacques Van Wijnen

Gerald Dicker

Wouter Lodewijk Elings

In the measurement of properties of a wafer substrate, such as Critical Dimension or overlay a sampling plan is produced () defined for measuring a property of a substrate, wherein the sampling plan comprises a plurality of sub-sampling plans. The sampling plan may be constrained to a predetermined fixed number of measurement points and is used () to control an inspection apparatus to perform a plurality of measurements of the property of a plurality of substrates using different sub-sampling plans for respective substrates, optionally, the results are stacked () to at least partially recompose the measurement results according to the sample plan.

Methods and apparatus for measuring a property of a substrate

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Eindhoven, Netherlands

Li Chung-Hsun