Taiwan Semiconductor Manufacturing Comp. Ltd.

Li-Chun Yang

Chao-Shun Hsu

Ming-Ta Yang

A semiconductor structure for providing isolations for on-chip inductors comprises a semiconductor substrate, one or more on-chip inductors formed above the first semiconductor substrate, a plurality of through-silicon-vias formed through the first semiconductor substrate in a vicinity of the one or more on-chip inductors, and one or more conductors coupling at least one of the plurality of through-silicon-vias to a ground, wherein the plurality of through-silicon-vias provide isolations for the one or more on-chip inductors.

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Tainan, Taiwan

Li-Chun Yang