Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (1 from 40,848 patents)
1 patent:
1. 6797627 - Dry-wet-dry solvent-free process after stop layer etch in dual damascene process